Scanning micro-elements for optical systems
US5818623A · kind A · utility
6Cited by
2References
62Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 10, 1996 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Jul 10, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This invention relates to a scanning micro-element for an optical system, characterized in that it comprises: a substrate (12), a membrane (14, 16) made of a dielectric material deposited on a substrate surface, the membrane defining two planes making a non-zero angle .alpha. between them, part (14) of the membrane including a reflecting area (20) capable of being deflected along at least a first direction above a cavity formed in the substrate, means (22, 24, 26, 28) to deflect this part of the membrane along at least one direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.