Method for localized deposition of noble metal catalysts with control of morphology
US5820922A · kind A · utility
13Cited by
1References
12Claims
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Key dates
| Filing date | Dec 17, 1996 |
| Grant date | Oct 13, 1998 |
| Priority date | — |
| Expiry date | Dec 17, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/46
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500 .degree. C.; Pt deposits only on the hot filament. The filaments tested to date are 2 .mu.m thick .times.10 .mu.m wide .times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.