Heated stage for a scanning probe microscope
US5821545A · kind A · utility
25Cited by
64References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 1996 |
| Grant date | Oct 13, 1998 |
| Priority date | — |
| Expiry date | Oct 11, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.