Carrier structure for transducers
US5821595A · kind A · utility
3Cited by
23References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 13, 1997 |
| Grant date | Oct 13, 1998 |
| Priority date | — |
| Expiry date | May 13, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0055
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A carrier structure for transducers. The semiconductor carrier structure mounts as a single unit to a force-impacted substrate and includes multiple piezoelectric elements integrally formed with the carrier structure, such that the elements are located in a space defining a window of the structure while maintaining their electrical contact and their precise position relative to the structure by use of thin-film, electrically conductive, metallic flexures attached to both the structure and the elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.