Interface apparatus for automatic test equipment
US5821764A · kind A · utility
52Cited by
15References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 1997 |
| Grant date | Oct 13, 1998 |
| Priority date | — |
| Expiry date | Sep 29, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interface between a test head portion of automatic test equipment and a handling device such as a prober. The interface employs preloaded kinematic couplings between the test head and the handling device and between the probe card and the test head. These couplings allow the probe card to be repeatedly positioned relative to the component in the handling device. They also reduce forces on the probe card to prevent distortion of the probe card. The interface provides separate mechanical and electrical loops such that mechanical precision is not dependant on the electrical structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.