Patent · US Expired

Spectrometry apparatus

US5822061A · kind A · utility

13Cited by
8References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 8, 1996
Grant dateOct 13, 1998
Priority date
Expiry dateNov 8, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J3/42
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The spectrometry apparatus of the present invention includes, in addition to conventional analysis, a first diaphragm having a first chosen variable aperture for spatially filtering a coherent-excitation beam. The apparatus also includes a first deflector stage (DF1) for sweeping an excitation beam over a sample according to a first chosen deflection. Additionally, there is included a second diaphragm having a second variable aperture conjugate with the first aperture for filtering the incoherent-scattering beam. The spectrometry apparatus further provides a second deflector stage placed downstream in order to sweep the spectral image of the incoherent-scattering beam thus filtered over the multichannel detection module according to a second chosen deflection.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.