Patent · US Expired

Gas sensor

US5824271A · kind A · utility

11Cited by
9References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 13, 1997
Grant dateOct 20, 1998
Priority date
Expiry dateMar 13, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T436/214
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A substrate carrying a first electrode and a second electrode, the first and second electrodes being disposed adjacent to one another, the first electrode being disposed between the substrate and a gas-sensitive component, the gas sensitive component comprising an n-type semiconductor, the gas-sensitive component having a resistance that is gas-dependent and temperature-dependent, and the second electrode being disposed between the substrate and a non-gas-sensitive component, the non-gas-sensitive component comprising a n-type semiconductor and a p-type semiconductor, the non-gas-sensitive component having a resistance that is temperature-dependent and that is not gas-dependent and wherein the n-type semiconductor of the non-gas-sensitive component is Ga.sub.2 O.sub.3 and the p-type semiconductor of the non-gas-sensitive component is ZrO.sub.2.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.