Gas sensor
US5824271A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 13, 1997 |
| Grant date | Oct 20, 1998 |
| Priority date | — |
| Expiry date | Mar 13, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/214
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate carrying a first electrode and a second electrode, the first and second electrodes being disposed adjacent to one another, the first electrode being disposed between the substrate and a gas-sensitive component, the gas sensitive component comprising an n-type semiconductor, the gas-sensitive component having a resistance that is gas-dependent and temperature-dependent, and the second electrode being disposed between the substrate and a non-gas-sensitive component, the non-gas-sensitive component comprising a n-type semiconductor and a p-type semiconductor, the non-gas-sensitive component having a resistance that is temperature-dependent and that is not gas-dependent and wherein the n-type semiconductor of the non-gas-sensitive component is Ga.sub.2 O.sub.3 and the p-type semiconductor of the non-gas-sensitive component is ZrO.sub.2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.