Interferometer alignment system utilizing a step calibration
US5825491A · kind A · utility
2Cited by
2References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 29, 1996 |
| Grant date | Oct 20, 1998 |
| Priority date | — |
| Expiry date | Feb 29, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/4535
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometer comprises a source of radiation (10) and a beam splitter (12) for forming two beams. The beams travel along different optical paths and the optical path difference of the paths can be varies by rotatable mirror pairs M2/M3 and M4/M5. One of the paths includes an adjustable mirror M6 which is tiltable in orthogonal directions. A control unit (18) can be automatically initiate periodically an alignment procedure for aligning the interferometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.