Articles having diamond-like protective film and method of manufacturing the same
US5827613A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 1994 |
| Grant date | Oct 27, 1998 |
| Priority date | — |
| Expiry date | Mar 10, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
Articles having a diamond-like protective film formed thereon, each comprising a substrate of a material selected from the group consisting of alloys containing at least Co, Ni, or Fe, ceramics, and glass and which has only a slight affinity for a diamond-like thin film, an Mo film formed on the substrate, and a diamond-like thin film formed further thereon. Such articles are manufactured by a method which comprises holding a grid made of Mo close to the surface of the substrate, bombarding the grid and the substrate surface with a bombarding gas consisting of inert gas atoms of Ar or the like, thereby removing contaminants from the surface and depositing Mo atoms on the substrate surface to form an Mo film thereon, ionizing a low-molecular-weight hydrocarbon or a feed gas capable of producing a low-molecular-weight hydrocarbon upon decomposition or reaction, and then accelerating the resulting ions and depositing the same on the Mo film to form a diamond-like film thereon. The substrate is preferably a metallic mold constructed of a hardened steel. The Mo film enhances the bond of the diamond-like film to the substrate and improves the strength of the mold surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.