Force or extension sensor

US5827980A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Gunter Doemens · Holzkirchen, DE
• Markus Gilch · Moosburg an der Isar, DE

Key dates

• Filing date: Feb 11, 1997
• Grant date: Oct 27, 1998
• Expiry date: Feb 11, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L1/142
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The force or extension sensor has a measuring capacitor (Mk) whose comb-like, interlocking electrode structures (Es1, Es2) can be adjusted in parallel with one another by two attachment points (Bp1, Bp2) as a function of the force (F) or the extension (E) to be measured. The total capacitance of the measuring capacitor (Mk) is determined by a parallel circuit having individual electrode pairs. A change in the total capacitance of the measuring capacitor (Mk) which is brought about by a change in the distances (d1) between the electrodes provides information on the force (F) or the extension (.epsilon.) to be measured. A change in the distances between the electrodes as a result of temperature-related extension is at least largely avoided by virtue of the fact that the attachment points (Bp1, Bp2) lie on a junction line (V1) which runs parallel to the direction of the electrodes (E1, E2) and is oriented at an angle (.alpha.) of 40.degree. to 50.degree., preferably 45.degree., with respect to the direction of the force (F) or the extension (.epsilon.) to be measured.