Field emitter device with a current limiter structure

US5828163A · kind A · utility

Assignee

• FED Corporation · US

Inventors

• Gary W. Jones · Raleigh, US
• Susan K. Jones · Raleigh, US
• Jeffrey R. Marino · Fishkill, US
• Joseph Ho · Wappingers Falls, US
• R. Mark Boysel · Pleasant Valley, US
• Steven M. Zimmerman · Pleasant Valley, US
• Yachin Liu · Poughkeepsie, US
• Michael J. Costa · Lincoln, US
• Jeffrey Silvernail · Yardley, US

Key dates

• Filing date: Jan 13, 1997
• Grant date: Oct 27, 1998
• Expiry date: Jan 13, 2017

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2329/00
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A field emitter device includes a column conductor, an insulator, and a resistor structure for advantageously limiting current in a field emitter array. A wide column conductor is deposited on an insulating substrate. An insulator is laid over the column conductor. A high resistance layer is placed on the insulator and is physically isolated from the column conductor. The high resistance material may be chromium oxide or 10%-50% wt % Cr+SiO. A group of microtip electron emitters is placed over the high resistance layer. A low resistance strap interconnects the column conductor with the high resistance layer to connect in an electrical series circuit the column conductor, the high resistance layer, and the group of electron emitters. One or more layers of insulator and a gate electrode, all with cavities for the electron emitters, are laid over the high resistance material. One layer of insulator is selected from a group of materials including SiC, SiO, and Si.sub.3 N.sub.4. An anode plate is attached with intermediate space between the anode plate and the microtip electron emitters being evacuated.