Illumination optical system
US5828496A · kind A · utility
5Cited by
6References
43Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1994 |
| Grant date | Oct 27, 1998 |
| Priority date | — |
| Expiry date | Dec 21, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/126
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination optical system includes a beam dividing device for dividing a radiation beam into plural illumination beams, and an optical arrangement for superposing the illumination beams one upon another on a surface to be illuminated, the optical arrangement having different focal distances in substantially orthogonal first and second directions, and the optical arrangement being adapted to focus each of the illumination beams on the surface in the first direction while defocusing the same in the second direction, whereby a linear illumination region is defined on the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.