Processing System and semiconductor device production method using the same including air conditioning control in operational zones
US5828572A · kind A · utility
19Cited by
17References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 5, 1996 |
| Grant date | Oct 27, 1998 |
| Priority date | — |
| Expiry date | Jul 5, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processing system for processing semiconductor devices includes an adjusting device for adjusting atmospheric conditions such as the cleanness and temperature in a clean room, at least one processing device disposed in the clean room, and a control device for controlling operation of the adjusting device in accordance with an operating state of at least one of the processing devices. The invention makes it possible to highly control the air conditioning of a required location and at a required time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.