Cartridge excimer laser system
US5828686A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 1997 |
| Grant date | Oct 27, 1998 |
| Priority date | — |
| Expiry date | Jan 14, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/03
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture (19), electrodes (50, 60) having external electrical connections (30, 40), and assembly (20) for transmitting a laser beam output (400), and an external gas port (90). The cartridge (10) fits onto a receptacle (100) located within a receiving compartment (200) of the laser base (300) of the new system. The cartridge (10) is easily replaced by the system operator and is refurbished by the manufacturer when the gas mixture (19) therein is exhausted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.