Automated tool for precision machining and imaging
US5831181A · kind A · utility
36Cited by
18References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 1995 |
| Grant date | Nov 3, 1998 |
| Priority date | — |
| Expiry date | Sep 29, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/856
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A modified Atomic Force Microscope (AFM), which can machine and image the surface of a sample with nanometer precision in all three orthogonal directions by varying the depth-of-cut of the sample. A multi-repetitive sensor system is provided as is a radially halved quartered electrode to substantially maintain parallelism or substantial parallelism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.