Article comprising an optical fiber attached to a micromechanical device
US5831262A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 27, 1997 |
| Grant date | Nov 3, 1998 |
| Priority date | — |
| Expiry date | Jun 27, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An article having an optical fiber integrally attached to a micro-device having spaced movable and nonmoving layers suitable for creating optical interference effects is disclosed. In one configuration, the micro-device is suitable for optical modulation, wherein the movable layer is electrostatically actuated to move towards the nonmoving layer. Such movement changes the size of the gap between the layers, resulting in a change in micro-device reflectivity. An optical signal is modulated by controlling micro-device reflectivity via a controlled voltage source. In a second configuration, the micro-device is suitable for measuring pressure. For pressure measurement, the movable membrane moves in response to pressure changes. The change in membrane position again results in a change in micro-device reflectivity. Reflectivity is correlatable to pressure. In a third configuration, the micro-device is suitable for measuring temperature. In the third configuration, the movable membrane is isolated from pressure effects by the addition of an evacuated cavity located beneath the membrane. The region between the movable and nonmoving layers is gas filled. Changes in gas pressure due to chan…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.