Ink jet recording head
US5831648A · kind A · utility
59Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1995 |
| Grant date | Nov 3, 1998 |
| Priority date | — |
| Expiry date | Dec 27, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/11
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A plurality of heaters are provided on a silicon substrate in a plurality of individual ink channels. Each heater is constructed from a thin-film resistor and a thin-film conductor. The thin-film resistor is formed with an electrical insulation layer at its upper surface. The electrical insulation layer is formed through subjecting the thin-film resistor to a high-temperature thermal oxidation process. The thin-film resistor formed with the electrical insulation layer may be covered with an additional insulation layer of a thickness substantially equal to the thin-film resistor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.