X-ray microscope
US5832052A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 24, 1996 |
| Grant date | Nov 3, 1998 |
| Priority date | — |
| Expiry date | Jun 24, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K7/00
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An X-ray microscope utilizing X-rays radiating from a laser-irradiated target so as to form an X-ray image of a specimen placed in a sample cell, the X-ray microscope includes a target for radiating X-rays when the same is irradiated with a laser beam, a sample cell for housing a specimen, the sample cell provided near the surface of target placed opposite to where the target is irradiated with the laser beam, and a detector for forming an X-ray image of the specimen by X-ray penetration, wherein the target, the sample cell and the detector are unified in a unit. The unit is placed at a place where the laser beam is irradiated to the target. A spacer is provided between the target and the sample cell, wherein the size of the spacer is determined depending on a distance between the specimen and the target. With this construction, this facilitates the fabrication of the unit. The unit is placed in the miniature vacuum chamber which comprises a division for housing the unit, and a space provided toward the target. And the vacuum chamber housing the unit is placed in an X-ray microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.