Specialty gas purification system
US5833738A · kind A · utility
13Cited by
21References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 1996 |
| Grant date | Nov 10, 1998 |
| Priority date | — |
| Expiry date | Mar 1, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/402
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method and apparatus are disclosed showing a system for continuous purification of bulk source specialty gases to less than 10 part per billion levels. Corrosive and non-corrosive specialty gases are purified using this system. Depending on whether corrosive or non-corrosive gases are being purified and the contaminants of concern, the purification beds contain an absorber and/or getter. A dual bed system allows one bed to purify at ambient temperatures while a second bed undergoes regeneration, providing continuous purification for a bulk source specialty gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.