Mobile charge measurement using corona charge and ultraviolet light
US5834941A · kind A · utility
59Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 11, 1997 |
| Grant date | Nov 10, 1998 |
| Priority date | — |
| Expiry date | Aug 11, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Corona charge is applied to an oxide layer on a semiconductor wafer. Then ultraviolet light is used to erase a grid pattern of the corona charge. Opposite polarity corona charge is then applied to the layer, resulting in a grid of field-induced PN junctions. The surface photovoltage of the junctions is measured over time to provide a measure of the mobile charge in the oxide layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.