Patent · US Expired

Apparatus and method for exposing a liquid crystal panel by beam scanning

US5835249A · kind A · utility

13Cited by
3References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 7, 1996
Grant dateNov 10, 1998
Priority date
Expiry dateFeb 7, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F1/133788
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An energy application apparatus and a method to operate at high speed that makes high usage of light. An exposure apparatus includes a laser oscillator, an optical shutter, imaging lenses, a screen, a vertical deflecting device, a horizontal deflecting device, a vertical moving device, a liquid crystal panel, and a controller. A light beam emitted from the laser oscillator passes through the optical shutter when in its open position, and is directed by the imaging lens onto the slit or pattern on the screen. After passing through the slit, the light is gradually made to converge by the imaging lens and to enter the galvanomirror. The galvanomirror deflects the beam by a predetermined angle in the vertical direction, and the deflected beam enters the galvanomirror. The galvanomirror deflects the beam by a predetermined angle in the horizontal direction. Thereafter, the beam exposes a desired location of the liquid crystal panel located on the stage to form an image thereon.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.