Film forming apparatus with particle prevention plate
US5837057A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 1996 |
| Grant date | Nov 17, 1998 |
| Priority date | — |
| Expiry date | Apr 22, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02T50/60
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A film-forming apparatus is provided with a particle prevention means, whose structure prevents a drop in film-yield due to particle formation. The particle prevention means does not need to be cleaned as frequently as known particle prevention means, thus increasing film production efficiency. This particle prevention means has a tongued-and-grooved surface. When the particle prevention means having a tongued-and-grooved surface is set in the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the particle prevention means, which can extend the time of film exfoliation, and in turn, extend the cycle for cleaning the particle prevention means, and prevent a drop in film-yield due to the film exfoliation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.