Gas sensor
US5837886A · kind A · utility
17Cited by
19References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 1997 |
| Grant date | Nov 17, 1998 |
| Priority date | — |
| Expiry date | Jun 27, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A film heater and thick-film electrode pads are provided on one main surface of a heat-resistant insulating substrate and are connected by through holes to a metal oxide semiconductor film on the tail surface. Pads are made of a gold alloy such as Au--Pt and connected to leads of Pt--W, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.