Device for determining the shape of the wave surface reflected by a substantially plane component
US5838442A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 26, 1997 |
| Grant date | Nov 17, 1998 |
| Priority date | — |
| Expiry date | Jun 26, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a device for determining the shape of the wave surface reflected by a substantially plane component (P), which includes a support (S) for the component (P), an interferometer (I), means for moving the support (S), and a control unit which determines, from the measurements by the interferometer (I), the shape of said wave surface. According to the invention, the device additionally includes a swivelling mirror (M1), which directs the measurement beam (FM) of the interferometer (I) orthogonally onto a surface (2) of the component (P), and an optical sensor (CO), which determines the position of the image of a light point (PO) of the measurement beam (FM), the orientation of the mirror (M1) being controlled in such a way as to bring the light point (PO) back to a reference position automatically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.