Ultraviolet/visible light emitting vertical cavity surface emitting laser and method of fabrication
US5838707A · kind A · utility
40Cited by
5References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1996 |
| Grant date | Nov 17, 1998 |
| Priority date | — |
| Expiry date | Dec 27, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/173
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An ultraviolet/blue/green vertical cavity surface emitting laser (VCSEL) for use in high density data storage that includes the fabrication of a VCSEL structure on a metallic single crystal substrate. The metallic single crystal substrate is utilized as a back reflecting mirror that in conjunction with an aluminum gallium nitride/gallium nitride distributed Bragg reflector serves to increase the overall reflectance of the VCSEL device. The metallic substrate is fabricated of a material such as nickel aluminum, thereby achieving an improved lattice match to the included III-nitride materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.