Transfer system for use with a horizontal furnace
US5839870A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 13, 1996 |
| Grant date | Nov 24, 1998 |
| Priority date | — |
| Expiry date | Mar 13, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An apparatus for preventing the cross contamination of heating element within horizontal furnaces is disclosed. A rotating spindle may connect to either or both of the lifting arm of a triaxial loader or the transfer plate of a loading station. A pair of spindles are able to lift a single wafer boat. Each spindle includes a plurality of active positions with one active position associated with each heating element of the horizontal furnace. A control processor monitors the position of the spindle and rotates the spindle to the active position associated with a heating element when a loading or unloading process is initiated for that heating element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.