Method for forming spacers in flat panel displays using photo-etching
US5840201A · kind A · utility
27Cited by
30References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 25, 1997 |
| Grant date | Nov 24, 1998 |
| Priority date | — |
| Expiry date | Apr 25, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/8625
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Photoetchable glass is used to form spacer elements for large area field emission displays. Frit dots are placed onto a substrate. A sheet of photo etchable glass is exposed to UV light using a mask such that the UV light exposes the etchable areas and does not expose the areas which will form the spacers. The etchable glass is then heat treated to crystallize the UV exposed areas and to tailor the coefficient of thermal expansion. Next the glass is adhered to the frit coated substrate and the UV exposed areas etched away leaving spacers adhered to frit dots.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.