Method used in manufacturing a workpiece using a plurality of spaced apart mask patterns
US5841101A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1995 |
| Grant date | Nov 24, 1998 |
| Priority date | — |
| Expiry date | Dec 19, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/162
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method used in manufacturing a workpiece using a plurality of spaced apart mask patterns includes two dividing steps and two focusing steps. The first step divides a light beam emitted from a light source into a plurality of light beams on a first plane including a first axis. A second step divides each of the plurality of light beams into a plurality of light beams on a second plane perpendicular to the first plane, the second plane including a second axis perpendicular to the first axis. A third step focuses the plurality of light beams produced by the second step only in the first direction. A fourth step focuses the plurality of light beams focused in this third step in the first direction at a position beyond the plurality of mask patterns in the second direction so that the light beams focused in the third step overlap each other to perform a plurality of spaced apart images, each of which illuminate one of the plurality of spaced apart mask patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.