Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus
US5841250A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 3, 1996 |
| Grant date | Nov 24, 1998 |
| Priority date | — |
| Expiry date | Oct 3, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3175
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
It is an object to provide a compact, lightweight, and inexpensive stage apparatus. A stage apparatus for moving a stage in a predetermined direction includes a stage accelerating/decelerating thrust generation unit arranged along the moving direction, a stage speed control thrust generation unit arranged to be parallel to the stage accelerating/decelerating thrust generation unit, an accelerating unit for generating a stage accelerating thrust at a portion corresponding to the stage accelerating interval of the accelerating/decelerating thrust generation unit, a decelerating unit for generating a stage decelerating thrust at a portion corresponding to the stage decelerating interval of the accelerating/decelerating thrust generation unit, and a speed control unit for controlling the stage thrust generated by the speed control thrust generation unit at least within a predetermined range between the accelerating interval and the decelerating interval.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.