Method and apparatus for imaging at a plurality of wavelengths
US5841567A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1996 |
| Grant date | Nov 24, 1998 |
| Priority date | — |
| Expiry date | Jul 2, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N1/2361
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An imaging system for imaging a substrate surface at several imaging wavelengths comprises a replaceable beam generating module, a spinning mirror and a controller. The beam generating module generates an imaging beam in dependence on beam command signals. The imaging beam has a wavelength which is a one of the plurality of imaging wavelengths. The beam generating module further presents the imaging beam along a prescribed path, and the beam generating module generates wavelength signals indicative of the imaging beam wavelength. The controller receives the wavelength signals, and generates the beam command signals in dependence on the wavelength signals. The beam command signals control generation of the imaging beam in accordance with a prescribed pattern to image upon the substrate surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.