Process for ion-supported vacuum coating

US5846608A · kind A · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Manfred Neumann · Marl, DE
• Klaus Goedicke · Dresden, DE
• Siegfried Schiller · Dresden, DE
• Jonathan Reschke · Dresden, DE
• Henry Morgner · Dresden, DE
• Falk Milde · Dresden, DE
• Fred Fietzke · Dresden, DE

Key dates

• Filing date: Oct 11, 1996
• Grant date: Dec 8, 1998
• Expiry date: Oct 11, 2016

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/32706
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A process an device for ion-supported vacuum coating. The process and the affiliated device is intended to permit the high-rate ating of large-surfaced, electrically conductive and electrically insulating substrates with electrically insulating and electrically conductive coatings with relatively low expenditure. The substrates are predominantly band-shaped, in particular plastic sheets with widths of over a meter. According to the invention, in an intrinsically known device for vacuum coating, alternating negative and positive voltage pulses are applied to the electrically conductive substrate or in electrically insulating substrates, to an electrode disposed directly behind them, e.g. the cooling roller, relative to the plasma or to an electrode that is disposed almost at plasma potential. The form, the voltage, and the duration of the pulses are adapted to the coating task and the material. The process is used particularly for depositing abrasion protection, corrosion protection, and barrier coatings. The user is the packaging industry, among others.