Method and apparatus for the evaluation of a depth profile of thermo-mechanical properties of layered and graded materials and coatings
US5847283A · kind A · utility
49Cited by
4References
40Claims
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Key dates
| Filing date | Jul 3, 1996 |
| Grant date | Dec 8, 1998 |
| Priority date | — |
| Expiry date | Jul 3, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB33Y80/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A technique for determining properties such as Young's modulus, coefficient of thermal expansion, and residual stress of individual layers within a multi-layered sample is presented. The technique involves preparation of a series of samples, each including one additional layer relative to the preceding sample. By comparison of each sample to a preceding sample, properties of the topmost layer can be determined, and residual stress at any depth in each sample, resulting from deposition of the top layer, can be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.