Patent · US Expired

Field emission device including a resistive layer

US5847496A · kind A · utility

14Cited by
14References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 5, 1997
Grant dateDec 8, 1998
Priority date
Expiry dateAug 5, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J9/025
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A microelectronic field emission device includes a core layer (16) having at least one outward protuberance on a top surface of the core layer, and an emitter layer (15) formed on the core layer to cover at least a top portion of the outward protuberance, the material of the core layer having a larger electrical resistance than the material of the emitter layer, wherein the top portion of the outward protuberance culminates to a tip and a portion of the emitter layer (15) formed on the protuberance culminates to a tip. The microelectronic device may further include a substrate (19), a conductive layer (17), an anode electrode (53) including a phosphor layer, and a gate electrode (21) having an opening thereby exposing the tip of the emitter layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.