Patent · US Expired

Electrical contact probe for sampling high frequency electrical signals

US5847569A · kind A · utility

100Cited by
6References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 8, 1996
Grant dateDec 8, 1998
Priority date
Expiry dateAug 8, 2016

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/852
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An all-electrical high frequency contact sampling probe provides sub-micron spatial resolution and picosecond or sub-picosecond temporal resolution. In a preferred embodiment, the probe is a monolithic integration of a sampling circuit with a cantilever and probe tip, where the distance between the circuit and the tip is less than a wavelength of interest in an RF signal V.sub.RF !. The sampling circuit 44! uses Schottky diodes SD! for sampling the RF signal V.sub.RF ! from a device under test at a rate determined by local oscillator signals 50, 52!. An IF signal V.sub.IF ! produced by the sampling probe is an equivalent time representation of the RF signal. Applications include testing signals at interior nodes of high speed integrated circuits.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.