Device for compensating deformations of a part of an optomechanical or micromechanical system

US5848206A · kind A · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Pierre Labeye · Grenoble, FR
• Eric Ollier · Grenoble, FR

Key dates

• Filing date: Oct 30, 1995
• Grant date: Dec 8, 1998
• Expiry date: Oct 30, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12145
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Device for compensating deformations of a part of an optomechanical or micromechanical system. This device compensates deformations, in a first direction (z), of a mobile part (26) of an apparatus, e.g. of a micromechanical and optomechanical nature, said mobile part being displaceable in a second direction (y), and having at least one arm (50, 52) connecting on the one hand a free end of the mobile part and a fixed part (16) of the apparatus, said arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z), so as to limit the deformations of the mobile part in said first direction.