Gas delivery systems for particle beam processing
US5851413A · kind A · utility
95Cited by
10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 1996 |
| Grant date | Dec 22, 1998 |
| Priority date | — |
| Expiry date | Jun 19, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31744
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus and method of an improved gas delivery system for delivering reactant material to a workpiece, such as a substrate, being operated on by a particle beam employs a shroud-type concentrator having an interior axial passage. Fluid reactant material is supplied to the axial passage for delivery to the workpiece. A particle beam can traverse the axial passage for impingement on the workpiece surface, concurrently if desired with the reactant delivery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.