Surface treatment of ceramic articles
US5851475A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 21, 1996 |
| Grant date | Dec 22, 1998 |
| Priority date | — |
| Expiry date | Jun 21, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B33/10
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.