Antisoiling coatings for antireflective surfaces and methods of preparation
US5851674A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 1997 |
| Grant date | Dec 22, 1998 |
| Priority date | — |
| Expiry date | Jul 30, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An antisoiling coating for an antireflective surface, particularly the outer surface of an antireflective film stack, wherein the antisoiling coating includes a fluorinated siloxane, preferably prepared by applying a coating composition of a fluorinated silane of the following formula: EQU R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x wherein: PA1 R.sub.f is a perfluorinated group optionally containing one or more heteroatoms; PA1 R.sup.1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; PA1 R.sup.2 is a lower alkyl group; PA1 X is a halide, a lower alkoxy group, or an acyloxy group; and PA1 x is 0 or 1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.