Cylindrical multiple-pole mass filter with CVD-deposited electrode layers
US5852302A · kind A · utility
30Cited by
7References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 21, 1997 |
| Grant date | Dec 22, 1998 |
| Priority date | — |
| Expiry date | Jan 21, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/4255
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A quadrupole mass filter, or a multiple-pole mass filter in general, composed of a cylindrical main body made of an insulating material and having a star-shaped cross-sectional profile whose inward bulges are curved substantially hyperbolic, and four electrode layers of a high melting point metal deposited by a chemical vapor deposition (CVD) process. The four electrode layers are separated at the outward bulges of the star-shaped cross-sectional profile. The quadrupole mass filter has pre-rod electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.