Angular velocity sensor
US5854427A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 7, 1997 |
| Grant date | Dec 29, 1998 |
| Priority date | — |
| Expiry date | May 7, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is related to an angular velocity sensor, and intends to improve the detection characteristic through a precise measuring of an angular velocity signal. For this objective, the invented angular velocity sensor comprises U-shape first and second piezoelectric elements(4),(5) bonded together sandwiching a detection electrode(6), wherein in at least one of the tuning fork arms(4a),(5a) the first and second piezoelectric elements(4),(5) are polarized in a direction of thickness along which the piezoelectric elements are bonded together. Driving electrodes(7),(12) and (8),(11) provided in diagonal arrangement on the tuning fork arm are supplied with driving signals inverse-phased to each other. In such a structure, the driving signals cancel to each other at the vicinity of detection electrode; as a result, the driving signals never mix with a detection signal to be detected by the detection electrode(6). Thus, the capability of detecting an angular velocity signal is improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.