Water discharge module for semi-conductor exhaust treatment apparatus
US5855822A · kind A · utility
Inventor
Key dates
| Filing date | Aug 22, 1997 |
| Grant date | Jan 5, 1999 |
| Priority date | — |
| Expiry date | Aug 22, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D47/06
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A water discharge module for semi-conductor exhaust treatment apparatus includes a discharge pipe having a curved pipe body and two orifices respectively connected to a reaction chamber of the module and a bottom end of a posterior filter tank; a water discharge pipe communicating with a central bottom end of the discharge pipe; and two annular nozzles disposed at the two nozzles of the discharge pipe. The nozzles spray water mist inwardly towards the interior of the pipe body. Due to the curved configuration of the pipe body and the nozzles spraying inwardly, there are no dead corners or spots in the pipe body so that exhaust can flow smoothly downwardly and waste water carrying particulates can also flow smoothly downwardly to the water discharge pipe for discharge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.