Micromachined photoionization detector
US5855850A · kind A · utility
23Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 29, 1995 |
| Grant date | Jan 5, 1999 |
| Priority date | — |
| Expiry date | Sep 29, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/66
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A photoionization detector includes a brittle substrate having a void micromachined therein with a void inlet and a void outlet. First and second electrodes are disposed in the void. An ultraviolet transparent member covers at least a portion of the void in which the electrodes are disposed. A gas sample passes through the void and is exposed to ultraviolet radiation from a UV source. Ionization of the sample is measured as current flowing between the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.