Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system
US5856672A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 29, 1996 |
| Grant date | Jan 5, 1999 |
| Priority date | — |
| Expiry date | Aug 29, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever for use in an atomic force microscope system is formed of single-crystal silicon and has an integral tip. The tip is formed by the convergence of three planes, one of which is one of the two outer generally parallel planes which define the thickness of the cantilever. The tip lies between the cantilever's two thickness-defining planar surfaces and is thus an in-plane integral tip. The cantilever is supported in the AFM system so that it makes an acute angle with the surface of the sample to be scanned. The cantilever can be supported in the AFM system so that the cantilever outer surface that converges to the tip is oriented to either face the sample or face away from the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.