Rod-fed electron beam evaporation system
US5861599A · kind A · utility
3Cited by
11References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 1997 |
| Grant date | Jan 19, 1999 |
| Priority date | — |
| Expiry date | Jun 9, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A rod-fed electron beam evaporation system having a rod-fed electron beam evaporation source for evaporating an ingot. The ingot is of rod-like configuration and has a peg-like element to self-engage a socket of a replacement ingot so that both ingot and replacement ingot are brought into alignment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.