Purge and rough cryopump regeneration process, cryopump and controller
US5862671A · kind A · utility
13Cited by
14References
63Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1997 |
| Grant date | Jan 26, 1999 |
| Priority date | — |
| Expiry date | May 2, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.