Patent · US Expired

Cantilevers for a magnetically driven atomic force microscope

US5866805A · kind A · utility

26Cited by
125References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 12, 1996
Grant dateFeb 2, 1999
Priority date
Expiry dateSep 12, 2016

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/875
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A force sensing cantilever for use in a scanning probe microscope has both a top side and a bottom side. From the bottom side extends a probe tip. The bottom side is coated with a thin film of a first material and the top side is coated with a thin film of a second material. The first and second materials may be the same or they may be different. The materials and thicknesses of the respective films are selected so as to create opposing forces to counter the tendency of such cantilevers to bend when a thin film is applied to only one side thereof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.