Patent · US Expired

Surface acoustic wave resonator, surface acoustic wave resonator unit, surface mounting type surface acoustic wave resonator unit

US5867074A · kind A · utility

21Cited by
1References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 18, 1996
Grant dateFeb 2, 1999
Priority date
Expiry dateJan 18, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A surface acoustic wave resonator unit using surface acoustic wave, in which a surface acoustic wave resonator formed by disposing an IDT and reflectors on a piezoelectric member thereof is mounted by a cantilever method so that a surface acoustic wave resonator unit exhibiting very stable resonance frequency, a low resonance resistance and a large Q-value is realized. By accommodating the surface acoustic wave resonator in a housing in a vacuum state, the Q-value can be enlarged. By anodic-oxidizing the electrodes forming the IDT, a thick oxide film can be formed, the oxide film enabling the electrodes to be protected from problems, such as short circuit taking due to foreign matters, such as dust, with the characteristics maintained. If the high performance surface acoustic wave resonator unit is molded together with a lead frame by resin, a surface acoustic wave device, that can be mounted on the surface, and that exhibits excellent reliability and high quality, can be provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.