Apparatus and method for optical scanning with an oscillatory microelectromechanical system
US5867297A · kind A · utility
77Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 1997 |
| Grant date | Feb 2, 1999 |
| Priority date | — |
| Expiry date | Feb 7, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical scanning system includes a light source to generate a light beam. An oscillatory microelectromechanical system including a mirror deflects the light beam in a predetermined manner. The light source and microelectromechanical system are formed in a silicon substrate. Rotational shafts in the microelectromechanical system facilitate oscillatory movement of the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.