Integrated gas laser RF feed and fill apparatus and method
US5867517A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1997 |
| Grant date | Feb 2, 1999 |
| Priority date | — |
| Expiry date | Apr 30, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0975
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A sealed gas laser tube (10) has a pair of electrically insulated electrodes (53, 54) supported in the tube (11) adapted to couple to an external RF supply (30). With respect to each electrode, an RF feed terminal (84) having an externally threaded stem (84a) supported in the tube cooperates, through a sealable common feed/fill port (43) in the housing (11), with a movable plunger (100) stem (102) having an internally threaded central recess (105) supported (90) by the electrode such that when the terminal and plunger are in first positions spaced apart from each other, the plunger stem is withdrawn from the feed/fill port which is open wider than in the prior art enabling faster evacuation and refilling, and, when the terminal and plunger are in second positions drawn together, the plunger stem is pulled into the feed/fill port sealingly contacting an inner portion (82a) of an o-ring (82), the outer portion (82c) of which is simultaneously compressed (83) by the RF feed terminal to sealingly contact a feed/fill port wall, thereby re-sealing the tube and enabling normal laser operations with the RF feeds supplying the RF excitation. An opening (93) in the electrode support through …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.