Method of producing articles by chemical vapor deposition and the support mandrels used therein
US5869133A · kind A · utility
44Cited by
15References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 1993 |
| Grant date | Feb 9, 1999 |
| Priority date | — |
| Expiry date | Sep 9, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An improved method of producing a diamond tube by chemical vapor deposition and a hollow support mandrel used therein. The method comprises depositing a diamond film on an outer side of the hollow mandrel by the CVD process. The mandrel is then etched away by subjecting an inner side of the mandrel to the etching action. It was unexpectedly discovered that the etch time is drastically reduced by using the hollow mandrels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.